15-114331-00	NR-15-114331-00 SCREW SKT HEX 1/4-20*5,N
02-00343-02	HARNESS SENSOR CABLE
02-00343-03	HARNESS SENSOR CABLE
02-00343-04	HARNESS SENSOR CABLE
02-257924-00	ASSY FEEDTHRU RF PWR
02-383160-00	FEEDTHRU
03-00034-00	NOVELLUS CQ CA36 POWER CABLE
03-00299-00	ASSY Inductor
05-00024-00	PM KIT HTR CONN DUAL FR
15-00027-02	guide nozzle adjuster
15-00043-02	adjuster ceramic gas plt
15-00229-00	NUT FEEDTHROUGH
15-00309-00	hanger nozzle
15-00362-00	Flange Spline bottom
15-00376-00	PIN Spindle Lift Guide
15-00386-00	15-00386-00 WASHER,FLAT,#10,NICKEL
15-00399-03	scerw hex 8-32
15-00399-04	screw  1.02 LG
15-00399-05	screw 1.12LG
15-00399-06	SCRW HEX 8-32X*1.23
15-00475-00	FEEDTHRU TOP PLATE
15-00516-00	bushing brake
15-00534-00	Flange  Brake
15-00553-10	shim heater 0.3mm
15-00553-18	shim heater 0.5mm
15-00553-25	shim heater 0.6mm
15-00553-30	shim heater 0.7mm
15-00558-01	SLEEVE HEATER LEAD 2.00"
15-00558-02	shield htr strap 2.75 LG
15-00567-00	Tube TC 1/8"id
15-00578-00	SLEEVE FLANGED
15-00654-00	Washer flance
15-00685-00	FEEDTHRU
15-00686-00	WASHER FT
15-00698-00	Screw fork
15-00721-00	Washer #8
15-00729-00	Clamp spindle
15-00935-01	Screw  10-32*.75
15-00951-00	Cup screw cover
15-01111-00	Paddle  optical  150mm  ceramic
15-032631-00	Keyed flange
15-108174-00	CUP SCREW COVER
15-108307-00	CLAMP RF STRAP
15-114331-00	SCREW SKT HEX 1/4-20*5 NI
15-258837-00	CLAMP RF STRAP 3.5
15-277459-00	CAP  FORK  C2SEQ-X
15-277460-00	FORK  C2SEQ-X
15-305056-00	Fork
15-305097-00	PLATE BOTTOM C1
15-305098-01	PLT TOP SPINDLE C1
15-326237-00	Screw hex long fork
15-376399-00	Screw flat 8-32
15-435871-00	CUP SCREW COVER
17-103987-00	Strap RF
17-258841-00	STRAP AL1100-O,RF PWR,SEQUE
19-379884-00	Wash flat
19-380481-00	Wash belleville
22-00361-00	O-RING
27-360890-00	Concept one
60-00023-00	EV VALVE
NVLS-KIT-01BV	NOVELLUS TYLAN VALVE PM KIT
	CA36 cable harness assy C1
04-130816-00	AE MATCH BRACKET 直角杆
15-00313-01	BLADE,WAFER PLACEMENT 黑
22-00325-00	C1 手臂旋转密封
15-00539-00	C1 手臂旋转密封盖
15-00518-00	C1 手臂旋转密封衬套
22-00324-00	C1 手臂延伸密封
22-00657-00	C1  Ll门密封圈
22-00656-00	C1 大框石英观察圈密封圈
22-00658-00	C1 大框门密封圈